JPH0717023Y2 - フアンクシヨンテスタ - Google Patents
フアンクシヨンテスタInfo
- Publication number
- JPH0717023Y2 JPH0717023Y2 JP1987120244U JP12024487U JPH0717023Y2 JP H0717023 Y2 JPH0717023 Y2 JP H0717023Y2 JP 1987120244 U JP1987120244 U JP 1987120244U JP 12024487 U JP12024487 U JP 12024487U JP H0717023 Y2 JPH0717023 Y2 JP H0717023Y2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- focused light
- substrate
- inspection point
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 23
- 238000007689 inspection Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 description 37
- 230000007246 mechanism Effects 0.000 description 17
- 230000005540 biological transmission Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987120244U JPH0717023Y2 (ja) | 1987-08-04 | 1987-08-04 | フアンクシヨンテスタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987120244U JPH0717023Y2 (ja) | 1987-08-04 | 1987-08-04 | フアンクシヨンテスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425747U JPS6425747U (en]) | 1989-02-13 |
JPH0717023Y2 true JPH0717023Y2 (ja) | 1995-04-19 |
Family
ID=31366183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987120244U Expired - Lifetime JPH0717023Y2 (ja) | 1987-08-04 | 1987-08-04 | フアンクシヨンテスタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0717023Y2 (en]) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541630B2 (en]) * | 1974-01-12 | 1979-01-26 | ||
JPS54122167A (en) * | 1978-03-15 | 1979-09-21 | Fujitsu Ltd | Probing mechanism |
-
1987
- 1987-08-04 JP JP1987120244U patent/JPH0717023Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6425747U (en]) | 1989-02-13 |
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