JPH0717023Y2 - フアンクシヨンテスタ - Google Patents

フアンクシヨンテスタ

Info

Publication number
JPH0717023Y2
JPH0717023Y2 JP1987120244U JP12024487U JPH0717023Y2 JP H0717023 Y2 JPH0717023 Y2 JP H0717023Y2 JP 1987120244 U JP1987120244 U JP 1987120244U JP 12024487 U JP12024487 U JP 12024487U JP H0717023 Y2 JPH0717023 Y2 JP H0717023Y2
Authority
JP
Japan
Prior art keywords
probe
focused light
substrate
inspection point
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987120244U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6425747U (en]
Inventor
高幸 鴨下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Graphtec Corp
Original Assignee
Graphtec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Graphtec Corp filed Critical Graphtec Corp
Priority to JP1987120244U priority Critical patent/JPH0717023Y2/ja
Publication of JPS6425747U publication Critical patent/JPS6425747U/ja
Application granted granted Critical
Publication of JPH0717023Y2 publication Critical patent/JPH0717023Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1987120244U 1987-08-04 1987-08-04 フアンクシヨンテスタ Expired - Lifetime JPH0717023Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987120244U JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987120244U JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Publications (2)

Publication Number Publication Date
JPS6425747U JPS6425747U (en]) 1989-02-13
JPH0717023Y2 true JPH0717023Y2 (ja) 1995-04-19

Family

ID=31366183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987120244U Expired - Lifetime JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Country Status (1)

Country Link
JP (1) JPH0717023Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541630B2 (en]) * 1974-01-12 1979-01-26
JPS54122167A (en) * 1978-03-15 1979-09-21 Fujitsu Ltd Probing mechanism

Also Published As

Publication number Publication date
JPS6425747U (en]) 1989-02-13

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